7/13/2010	9:48:38 AM	Bypass valve closed
7/13/2010	9:48:39 AM	Main Vac valve closed
7/13/2010	9:49:05 AM	Bypass valve opened
7/13/2010	9:49:06 AM	Main Vac valve opened
7/13/2010	10:16:55 AM	Recipe started at 10:16 AM
7/13/2010	10:16:55 AM	Helium valve closed
7/13/2010	10:16:55 AM	BCl3 valve closed
7/13/2010	10:16:55 AM	PH3 valve closed
7/13/2010	10:16:55 AM	SiCl4 pre valve closed
7/13/2010	10:16:55 AM	SiCl4 post valve closed
7/13/2010	10:16:55 AM	Main Vac valve closed
7/13/2010	10:16:55 AM	Bypass valve closed
7/13/2010	10:16:55 AM	Bubbler valve closed
7/13/2010	10:16:55 AM	H2 valve opened
7/13/2010	10:16:55 AM	Helium MFC set to  0.000000
7/13/2010	10:16:55 AM	H2 MFC set to  500.000000
7/13/2010	10:16:55 AM	BCl3 MFC set to  0.000000
7/13/2010	10:16:55 AM	PHl3 MFC set to  0.000000
7/13/2010	10:16:55 AM	SiCl4 MFC set to  0.000000
7/13/2010	10:16:55 AM	Bypass solenoid MFC set to  0.000000
7/13/2010	10:16:55 AM	Tube furnace set to 0
7/13/2010	10:18:18 AM	Helium valve closed
7/13/2010	10:18:18 AM	BCl3 valve closed
7/13/2010	10:18:18 AM	PH3 valve closed
7/13/2010	10:18:18 AM	SiCl4 pre valve closed
7/13/2010	10:18:18 AM	SiCl4 post valve closed
7/13/2010	10:18:18 AM	Main Vac valve closed
7/13/2010	10:18:18 AM	Bypass valve closed
7/13/2010	10:18:18 AM	H2 valve opened
7/13/2010	10:18:18 AM	Bubbler valve opened
7/13/2010	10:18:18 AM	Helium MFC set to  0.000000
7/13/2010	10:18:18 AM	H2 MFC set to  500.000000
7/13/2010	10:18:18 AM	BCl3 MFC set to  0.000000
7/13/2010	10:18:18 AM	PHl3 MFC set to  0.000000
7/13/2010	10:18:18 AM	SiCl4 MFC set to  0.000000
7/13/2010	10:18:18 AM	Bypass solenoid MFC set to  0.000000
7/13/2010	10:18:18 AM	Tube furnace set to 1000
7/13/2010	10:38:18 AM	Helium valve closed
7/13/2010	10:38:18 AM	BCl3 valve closed
7/13/2010	10:38:18 AM	PH3 valve closed
7/13/2010	10:38:18 AM	Main Vac valve closed
7/13/2010	10:38:18 AM	Bypass valve closed
7/13/2010	10:38:18 AM	H2 valve opened
7/13/2010	10:38:18 AM	SiCl4 pre valve opened
7/13/2010	10:38:18 AM	SiCl4 post valve opened
7/13/2010	10:38:18 AM	Bubbler valve opened
7/13/2010	10:38:18 AM	Helium MFC set to  0.000000
7/13/2010	10:38:18 AM	H2 MFC set to  500.000000
7/13/2010	10:38:18 AM	BCl3 MFC set to  15.000000
7/13/2010	10:38:18 AM	PHl3 MFC set to  0.000000
7/13/2010	10:38:18 AM	SiCl4 MFC set to  50.000000
7/13/2010	10:38:18 AM	Bypass solenoid MFC set to  0.000000
7/13/2010	10:38:18 AM	Tube furnace set to 1000
7/13/2010	12:16:59 PM	H2 valve closed
7/13/2010	12:16:59 PM	BCl3 valve closed
7/13/2010	12:16:59 PM	PH3 valve closed
7/13/2010	12:16:59 PM	SiCl4 pre valve closed
7/13/2010	12:16:59 PM	SiCl4 post valve closed
7/13/2010	12:16:59 PM	Main Vac valve closed
7/13/2010	12:16:59 PM	Bypass valve closed
7/13/2010	12:16:59 PM	Helium valve opened
7/13/2010	12:16:59 PM	Bubbler valve opened
7/13/2010	12:16:59 PM	Helium MFC set to  500.000000
7/13/2010	12:16:59 PM	H2 MFC set to  0.000000
7/13/2010	12:16:59 PM	BCl3 MFC set to  0.000000
7/13/2010	12:16:59 PM	PHl3 MFC set to  0.000000
7/13/2010	12:16:59 PM	SiCl4 MFC set to  0.000000
7/13/2010	12:16:59 PM	Bypass solenoid MFC set to  0.000000
7/13/2010	12:16:59 PM	Tube furnace set to 0
7/13/2010	12:36:59 PM	Helium valve closed
7/13/2010	12:36:59 PM	H2 valve closed
7/13/2010	12:36:59 PM	BCl3 valve closed
7/13/2010	12:36:59 PM	PH3 valve closed
7/13/2010	12:36:59 PM	SiCl4 pre valve closed
7/13/2010	12:36:59 PM	SiCl4 post valve closed
7/13/2010	12:36:59 PM	Main Vac valve closed
7/13/2010	12:36:59 PM	Bypass valve closed
7/13/2010	12:36:59 PM	Bubbler valve closed
7/13/2010	12:36:59 PM	Helium MFC set to  0.000000
7/13/2010	12:36:59 PM	H2 MFC set to  0.000000
7/13/2010	12:36:59 PM	BCl3 MFC set to  0.000000
7/13/2010	12:36:59 PM	PHl3 MFC set to  0.000000
7/13/2010	12:36:59 PM	SiCl4 MFC set to  0.000000
7/13/2010	12:36:59 PM	Bypass solenoid MFC set to  0.000000
7/13/2010	12:36:59 PM	Tube furnace set to 0
7/13/2010	12:36:59 PM	Run finished at 12:36 PM
